Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

Lackner J.M., Waldhauser W., Ebner R., Beutl M., Jakopic G., Leising G., Hutter H., Rosner M.
Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films. Applied Physics A: Materials Science & Processing, Special issue on Laser Ablation, Appl. Phys. A 79, 1525-1527, (2004), 2004