Reactive Ion Etching (RIE) O2/Ar/N2/SF6/CFu

A further process for the fabrication of topographic structures used in micro- and nanotechnology is reactive ion etching (RIE). It is an ion-assisted reactive etching process with excellent etching behavior in terms of homogeneity, etch rate, etch profile and selectivity.

 

Etched pyramids (SEM)

Etched pyramids (SEM)