Materials

Scientific publication

Pulsed Laser Deposition: A new technique for deposition of amorphous SiOx thin films

Publication from Materials

DDr Jürgen Lackner, Dr Wolfgang Waldhauser, Ebner R., Lenz W., Suess C., Dr Georg Jakopic, Leising G., Hutter H.

10th International Conference on Metallurgical Coatings and Thin Film (ICMCTF) Proc., (2002), 2003