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Analysis & performance
 
Materials

Scientific publication

Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

Publication from Materials

Lackner J.M., Waldhauser W., Ebner R., Beutl M., Jakopic G., Leising G., Hutter H., Rosner M.

Appl. Phys. A 79, 1525-1527, (2004) Applied Physics A: Materials Science & Processing, Special issue on Laser Ablation, 2004