Materials

Scientific publication

Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

Publication from Materials

DDr Jürgen Lackner, Dr Wolfgang Waldhauser, Ebner R., Beutl M., Dr Georg Jakopic, Leising G., Hutter H., Rosner M.

Appl. Phys. A 79, 1525-1527, (2004) Applied Physics A: Materials Science & Processing, Special issue on Laser Ablation, 2004