Pulsed Laser Deposition: A new technique for deposition of amorphous SiOx thin films

Publication from Materials

Lackner J.M., Waldhauser W., Ebner R., Lenz W., Suess C., Jakopic G., Leising G., Hutter H.

10th International Conference on Metallurgical Coatings and Thin Film (ICMCTF) Proc., (2002), 2003