We use cookies

We use cookies on our website. Some of them are essential while others help us improve this website and your experience.

Essential
 
Materials

Scientific publication

Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

Publication from Materials

Lackner J.M., Waldhauser W., Ebner R., Beutl M., Jakopic G., Leising G., Hutter H., Rosner M.

Appl. Phys. A 79, 1525-1527, (2004) Applied Physics A: Materials Science & Processing, Special issue on Laser Ablation, 2004