Pulsed Laser Deposition: A new technique for deposition of amorphous SiOx thin films

Publikation aus Materials

Lackner J.M., Waldhauser W., Ebner R., Lenz W., Suess C., Jakopic G., Leising G., Hutter H.

10th International Conference on Metallurgical Coatings and Thin Film (ICMCTF) Proc., (2002), 2003