Materials

Wissenschaftliche Publikation

Pulsed laser deposition of non-stoichiometric silicon nitride (SiNx) thin films

Publikation aus Materials

DI DDr. mont. Jürgen Lackner, DI Dr. mont. Wolfgang Waldhauser, Ebner R., Beutl M., DI Dr. Georg Jakopic, Leising G., Hutter H., Rosner M.

Appl. Phys. A 79, 1525-1527, (2004) Applied Physics A: Materials Science & Processing, Special issue on Laser Ablation, 2004