Method

Atomic Force Microscopy (AFM)

Atomic force microscopy (AFM) for high-resolution topography measurement for nanoanalysis and material characterization as well as analysis of piezoelectric properties.

Equipment

Atomic Force Microscopy (AFM) – Jupiter XR / Oxford Instruments (Asylum Research)

Method

Non-destructive high-resolution topographical imaging and advanced electrical or mechanical characterization on the micro/nanoscale, e.g. piezoelectric force microscopy (PFM)

Expected Result

Detailed surface topography, mechanical response data, measurement of ferro- & piezoelectric as well as electrical properties (surface potential, current, breakdown voltage …)
in e.g. polymer and dielectric layers.

Case Study

A customer is interested in the piezoelectric response of an individual small sensor element in a sensor array and in the transition temperature at which the piezoelectric properties are lost. The AFM, equipped with piezo force measurement capabilities, identifies the mechanical response, when a voltage is applied. Using the heater/cooler stage, in-situ information on the thermal behavior is gathered.

Specifications

Max. sample height: 35 mm
200 mm samples fully-addressable with high-speed stage
Piezo scanner: 100 μm X-Y & 12 μm Z range
Acquisition time (topography): minutes to seconds per frame (VideoAFM)
Measurement in inert atmosphere or liquids possible
Active sample cooling/heating from -30°C up to 120°C or from RT to 300°C (passive cooling) for samples of 20 mm and smaller
High voltage manipulation with up to +/- 150 V possible
I/V measurements with a current gain of up to 109 V/A
BlueDrive™ cantilever excitation for more reproducible results and simplified operation