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Process Benefits of Wide Area, Low Energy End-Hall Ion Source for Surface Pre- Cleaning and Functional Treatment of Polymeric Substrate Materials

Beteiligte Autor*innen der JOANNEUM RESEARCH:
Authors
Lackner, Juergen M.; Waldhauser, Wolfgang; Mahoney, Leonard J.; Davis, John
Title:
Process Benefits of Wide Area, Low Energy End-Hall Ion Source for Surface Pre- Cleaning and Functional Treatment of Polymeric Substrate Materials
Publikationsdatum
2009

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