2D and 3D structuring with laser lithography
High-resolution 3D structuring using two-photon lithography, as well as 2D and continuous 2.5D structuring using maskless grayscale laser lithography and electron beam lithography
Laser lithography for the production of micro- and nanostructures © JOANNEUM RESEARCH
We have unique technologies for high-resolution 3D structuring using two-photon lithography, continuous 2.5D structuring using maskless grayscale laser lithography or laser ablation and 2D nanostructuring with electron beam lithography. Due to the possibility of high-resolution production of embossing tools, they form an important basis for our UV-NIL processes.
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Other products and services
Environmental, bioanalytical and diagnostic sensor technology combined with smart microfluidic lab-on-a-chip and organ-on-a-chip systems
Cost-effective solutions by extending the functions of classic LED-based lighting systems in the areas of Visible Light Communication, Visible Light Positioning and Visible Light Sensing
R2R-UV-NIL pilot line for the continuous and cost-effective production of micro- and nanostructures on flexible large-area film substrates
Development of customised prototypes, especially in the areas of LED lighting and sensor technology: circuit design, the conception of the system through to prototyping
Scalable and digital printing processes (including 3D printing of electronics) for generative manufacturing of functional components
Overall concepts for design, simulation, optimisation and prototyping of optical components for customised lighting solutions
Replication of master structures almost seamlessly onto large surfaces (380 x 700 mm²) using a step&repeat UV-NIL process
Measurement and analysis of the smallest structures, layers and components on a micro- and nanometre scale
Complete solutions from optical simulation, mastering and prototyping to the transition to high volume, cost effective production of optical structures and components
Reusable materials, components and compounds and their applications, e,g, coatings developed in-house for UV imprint lithography (NILcure®)