2D and 3D structuring with laser lithography
High-resolution 3D structuring using two-photon lithography, as well as 2D and continuous 2.5D structuring using maskless grayscale laser lithography and electron beam lithography
Laser lithography for the production of micro- and nanostructures © JOANNEUM RESEARCH
We have unique technologies for high-resolution 3D structuring using two-photon lithography, continuous 2.5D structuring using maskless grayscale laser lithography or laser ablation and 2D nanostructuring with electron beam lithography. Due to the possibility of high-resolution production of embossing tools, they form an important basis for our UV-NIL processes.
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Other products and services
Functional coating processes: Plasma and vacuum coating (PVD, PA-CVD), atmospheric pressure plasma coating processes as well as digital printing processes
R2R-UV-NIL pilot line for the continuous and cost-effective production of micro- and nanostructures on flexible large-area film substrates
Replication of master structures almost seamlessly onto large surfaces (380 x 700 mm²) using a step&repeat UV-NIL process
Reusable materials, components and compounds and their applications, e,g, coatings developed in-house for UV imprint lithography (NILcure)
Printable sensor inks and sensors with piezoelectric, pyroelectric and magnetoelectric features
Environmental, bioanalytical and diagnostic sensor technology combined with smart microfluidic lab-on-a-chip and organ-on-a-chip systems
Deposition, Analysis and Assessment Package for PVD Coatings
Cost-effective solutions by extending the functions of classic LED-based lighting systems in the areas of Visible Light Communication, Visible Light Positioning and Visible Light Sensing
Ultrashort laser pulses to directly write 3D microstructures in a variety of different materials
Laser welding, laser alloying and laser cladding, with a particular focus on materials expertise
Development of customised prototypes, especially in the areas of LED lighting and sensor technology: circuit design, the conception of the system through to prototyping
Scalable and digital printing processes (including 3D printing of electronics) for generative manufacturing of functional components
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