Accurate raman spectroscopy of diamond-like carbonfilms deposited by an anode layer source

Publikation aus Materials

Kahn M., Cekada M., Berghauser R., Waldhauser W., Bauer C., Mitterer C., Brandstätter E.

Diamond and Related Materials 17 (7-10), pp. 1647-1651, 2008


Diamond-like carbon (DLC) films deposited by a new room-temperature deposition method were critically investigated by Raman spectroscopy. A gridless, linear anode layer source was fed with acetylene at different flow rates at varying applied voltages producing highly adhesive and transparent DLC films. Raman spectra showed a correlation between the intensity ratio

ID/IG and the voltage applied to the ion source. When increasing the voltage from 1 to 3kV, the intensity ratio increased from 0.48 ± 0.02 to 0.59 ± 0.01 (measured at an excitation wavelength of 532nm and fitted with Gaussian functions). These observations were confirmed by stress measurements, where an increase of the voltage from 1 to 3kV resulted in a decrease of the compressive stress from − 2.34 ± 0.17 to − 0.85 ± 0.02GPa, indicating a decreased sp3-hybridised carbon fraction at elevated voltage. Under the described conditions we observed maximum substrate temperatures of 70°C after deposition processes for several hours which clearly show the unique features of this relatively new deposition technique for hydrogenated tetrahedral DLC films.

Download (233 kB)