Manufacturing of freeform micro-optical elements by mask-less laser direct write lithography and replication by imprinting

Publikation aus Materials

L. Kuna, C. Leiner, S. Ruttloff, W. Nemitz, F. Reil, P. Hartmann, F. P. Wenzl , C. Sommer

SPIE PROCEEDINGS, Volume 9949, Advances in Polymer Optics I , 2016