New trends in coating: Room temperature deposition of titanium-based films
Publikation aus Materials
Lackner J.M., Waldhauser W., Berghauser R., Ebner R., Major B., Fian A., Jakopic G.,
Inzyniera Materialowa 140, pp. 611-615, 2004
Titanium-based compounds are widely spread coating materials for mechanical, tribological, electrical, optical, catalytic, sensoric, microelectronical applications due to their exceptionally physical and chemical properties. Recently, the trend of using temperature-sensitive materials like polymers and also tool steels of the highest hardnesses demands new lowtemperature coating techniques for protective surface finishing as well as for functionalization of the surfaces. Titanium-based compounds can fulfill a wide range of these demands, but up to now there is a lack of industrially designed
vacuum coating techniques operating at the temperatures lower than 50 °C necessary for these applications. The Pulsed Laser Deposition (PLD) process is known as one of the most promising candidates for the such problems. But up to now PLD is a well-established laboratory coating technology and has not become a standard industrial coating technique despite its outstanding process features. The missing of PLD coating systems, which fulfil the requirements for industrial applications like high-rate deposition and adequate sizes of deposition chambers is considered as one of the main obstacles for a breakthrough of the PLD technique. To overcome this problem an industrially designed PLD coating system has been developed and built at the Laser Center Leoben of JOANNEUM RESEARCH Forschungsgesellschaft mbH. The current paper summarizes results of structural, mechanical, tribological, optical and electrical investigations of the presently most important Ti-based coatings metallic titanium, titanium nitride (TiN), titanium oxide (TiO2) and titanium carbonitride (TiCN)..