Synthesis of Graphene-layer Nanosheet Coatings by PECVD
Publikation aus Materials
B. C. Bayer,
Materials Today, 2015, 8, 4247-4255 , 11/2015
Plasma enhanced chemical vapor deposition (PECVD) is a potentially industrially scalable route for graphene synthesis. Thin carbon coatings were deposited by PECVD from C2H2 and post-deposition irradiated by Ar+. Irradiation with 400 eV accelerated Ar+, deposition temperatures of 400 °C and post deposition annealing up to 800 °C result in crystal growth and graphitization, i.e. increased fraction of C-C sp2 bonding. The same effect is achieved by deposition on copper and nickel foils, and interestingly on NaCl. For irradiated samples a two-layer graphene-layer nanosheet morphology is indicated from our characterization, with a variation of film properties across the film thickness.