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Publikationen
Materials

Surface Texturing of High-Power Flip-Chip LEDs by Femtosecond Laser Direct Structuring

Autor*innen:
Kuna, Ladislav; Haase, Anja; Reil, Frank; Sommer, Christian; Krenn, Joachim R.; Hartmann, Paul; Pachler, Peter; Tasch, Stefan; Wenzl, Franz Peter
Abstract:
We report on the femtosecond laser direct structuring of the sapphire flipside surfaces of high-power flip-chip LEDs. It is found that diameter and depth of the created submicrometer-sized holes can be manipulated by varying the laser power at a constant number of laser pulses. This method enables the control of the structure sizes with high precision. Our study shows that the light extraction from such LEDs increases strongly with increasing hole sizes.
Titel:
Surface Texturing of High-Power Flip-Chip LEDs by Femtosecond Laser Direct Structuring
Seiten:
1250–1256
Publikationsdatum
2009-08

Publikationsreihe

Nummer
15
Beitrag
4
ISSN
1558-4542
Proceedings
IEEE Journal of Selected Topics in Quantum Electronics
Weitere Dateien und links
Jahr/Monat:
2009

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