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R2R-UV-nanoimprinting as a powerful mean for large-area fabrication of freeform micro-optical elements

Authors
B. Stadlober, C. Leiner, D. Nees, A. Haase, U. Palfinger, L. Kuna, S. Ruttloff, M. Smolka, J. Hesse, M. Sonnleitner, and C. Sommer
Abstract:
R2R-UV-nanoimprinting sets new benchmarks for the fabrication of miniaturized, low-cost and low-weight freeform micro-optical elements applicable in lighting, display, medical diagnostics, etc. We demonstrate the related process chain, combining optical design, direct laser lithography, step&repeat imprinting and R2R reproduction.
Title:
R2R-UV-nanoimprinting as a powerful mean for large-area fabrication of freeform micro-optical elements
Publikationsdatum
10.06.2019

Publikationsreihe

Name
Optical Design and Fabrication

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